Search
Close this search box.
ANSEROS ozone water treatment system PAP-SC-200-2

Ozone Water Treatment System PAP-SC-200

ANSEROS ozone water treatment system PAP-SC-200

Product details

In semiconductor processing in particular, a completely clean ozone system is required. Any metals and particles emitted from the ozone system onto to the semiconductor surfaces during processing (Wafer/IMEC/RCA/SOM, etc.) affect the quality of the microchip. Including their components โ€“ as for example the ozone generator COM-AD or the ozone monitor WM โ€“, the Anseros Water Systems PAP-SC are entirely free of metals in contact with ozone. They are ready for clean wet and dry processing, regardless if with or without acids. To ensure safety, the PAP-SC system includes an ozone destroyer CAT-HO.
Ref. PAP-SC-200
Gas flow: 100 โ€ฆ. 1000 Nl/h
O3: 100 โ€“ 300 g O3/m3
Material in contact with ozone: PFA, quartz
IMEC and RCA cleaning processes
UPW systems
Advanced oxidation processes AOP
Three phase systems
Biodegradation DOC
Sterilization
Sanitization CIP

Contact us and arrange a non-binding consultation. We will be happy to advise you personally and individually. Tel: +49-(0)7071-7995-0

CONTACT US

Please complete the mandatory fields *