ANSEROS ozone water system PAP SC 200

Applications

IMEC and RCA cleaning processes
UPW systems
Advanced oxidation processes AOP
Three phase systems
Biodegradation DOC
Sterilization
Sanitization CIP

Technical data

Gas flow: 100 …. 1000 Nl/h
O3: 100 – 300 g O3/m3
Material in contact with ozone: PFA, quartz

Ozone Water Treatment System PAP-SC-200

Article number: PAP-SC-200

Product details

In semiconductor processing in particular, a completely clean ozone system is required. Any metals and particles emitted from the ozone system onto to the semiconductor surfaces during processing (Wafer/IMEC/RCA/SOM, etc.) affect the quality of the microchip. Including their components – as for example the ozone generator COM-AD or the ozone monitor WM –, the Anseros Water Systems PAP-SC are entirely free of metals in contact with ozone. They are ready for clean wet and dry processing, regardless if with or without acids. To ensure safety, the PAP-SC system includes an ozone destroyer CAT-HO.

Industries

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Contact us and arrange a non-binding consultation. We will be happy to advise you personally and individually. Tel: +49-(0)7071-7995-0

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