Ozone Water Treatment System PAP-SC-3000

ANSEROS-ozone-water-system-PAP-SC-3000-3

OZONE WATER TREATMENT SYSTEM PAP-SC-3000

PRODUCT DETAILS

In semiconductor processing in particular, a completely clean ozone system is required. Any metals and particles emitted from the ozone system onto to the semiconductor surfaces during processing (Wafer/IMEC/RCA/SOM, etc.) affect the quality of the microchip. Including their components – as for example the ozone generator COM-AD or the ozone monitor WM –, the Anseros Water Systems PAP-SC are entirely free of metals in contact with ozone. They are ready for clean wet and dry processing, regardless if with or without acids. To ensure safety, the PAP-SC system includes an ozone destroyer CAT-HO.

APPLICATIONS

+ IMEC and RCA cleaning processes
+ UPW systems
+ Advanced oxidation processes AOP
+ Three phase systems
+ Biodegradation DOC
+ Sterilization
+ Sanitization CIP

TECHNICAL DATA

DI-water flow: 100 … 4000 l/h
DO3: 1 … 100 ppmw
Material in contact with ozone: PFA, quartz

PLEASE CONTACT US FOR FURTHER INFORMATION

Contact Form

    Your Name *

    Tile

    Your E-Mail Address *

    Your website address (optional)

    Telephone Number *

    Organization or Company Name *

    Street Name & Number *

    Area Postal Code *

    City Name *

    Country Name *

    Your message *

    Fields with * marking are compulsory to fill

    By using this form you agree with the storage, handling of your data by this website. Please see our privacy policy under Data Protection Declaration.

    The transmission of your request is encrypted (SSL / TLS). We assure you that your personal data will be used exclusively to contact us. We will not provide this data to third parties. Furthermore, we assure you that you will not receive an e-mail from us that is not related to this request.