PRODUCT DETAILS

The modular process chamber provides a variety of possibilities. It is custom-configured with regard to:
+ Gas or air pressure
+ Gas amount and gas flushing
+ Lock
+ Illumination or irradiation
+ Gloves
+ Temperature, humidity, gas doping, gas composition
+ Parallel and serial connection of chambers
+ Opening, locking and sealing of the chamber

APPLICATION

+ Semiconductor industry
+ Medical and cell research
+ Cosmetics development
+ Animal testing
+ Lung research
+ Issuing of emission and immission limits
+ Material testing
+ Sterilization of tools and equipment
+ Research on object surfaces (hygiene, anticavitation)
+ Life sciences tests
+ Incubators
+ Sensor tests

TECHNICAL DATA

Chamber material: stainless steel, plexiglas, mineral glass
Chamber size: 120 liters
Dimension inside: T600 x W600 x H350 mm
Vacuum technology: PFEIFFER VC components

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