Ozone technology in semiconductor industry

The use of ozone for cleaning wafers has become established by now. The fact that ozone oxidizes organic and metal contaminants in the water phase is made use of. Please ask for more details!

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Ozone for oxidation and sterilisation in semiconductors (SC)

In recent years, the interest of more powerful chips has grown exponentially. It is known that so-called wafers are used for chip production. The production of the highly sensitive silicon plates requires a high-quality standard with ultra-clean manufacturing processes.

The wafer surfaces are cleaned to improve the quality of the circuit boards. Chemical solutions for surface cleaning are used as standard at this point. However, these cleaning methods have proven to be extremely environmentally unfriendly and inefficient. Instead, the use of ozone in the production process has proven to be the best alternative to standard methods. In addition to the consumption of chemicals and the associated costs, the process performance is increased.

With the use of ozone, substances occurring in particular in the cleaning and wet cleaning process are completely dissolved. Organic and metallic pollutants are oxidized with the high ozone content in the water phase. Any residues are thus avoided on the wafer. In addition, ozone technology is already being used on inorganic substances in the solid state. For example, ozone is used for the removal of photoresist coatings and the oxidation of silicon. On the other hand, ozone disinfection takes place in the treatment of deionized water to combat the appearance of microbiological cultures. [1] [2] [3]

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    Why ANSEROS SC-products and semi-solutions

    • The original: 40 years of experience in ozone technology

    • Ozone systems from a single source (internal and external communication of the devices compatible)

    • Ozone application in DI- and RO-water at high concentrations, as well as in acidic and wet chemical processes

    • Ozone systems redundantize the use of chemicals

    • Consulting and planning by ANSEROS Engineering Team included

    • Membership in International Ozone Association (IOA), Ozone Quality Committee, FIGAWA and DVGW

    • Accredited by AiF Industrieforschung

    • Over 1000 customers in 40 countries with an export rate of 70% of sales accounts

    • Global distribution network and worldwide service offering

    • Made and tested in Germany

    Benefits of ANSEROS SC-products and semi-Solutions

    +Total cost of ownership (TOC)

    + Ozone generation systems according to DIN 19627

    + Metal-free ozone production by quartz glass modules

    + Bubble-free ozone generation by plate discharge

    + Corrosion-free ozone generators and maintenance-free ozone measuring devices

    + Failure-free day and night use and a long product life

    + High-precision and highly energy-saving NDUV-measurement technology using innovative UVL technology

    + Use of stainless steel material components

    + Use of PFA material components

    + Use of SIEMENS PLC controls with touch panel and different language selection

    + Digital ozone analyzer and generators with digital interfaces and display monitors

    + Fast-functioning ozone monitors for safe ozone monitoring with alert modules

    + Certified quality with CE-approved devices

    + RoHs- and REACH-confirmity

    Ozone applications in semiconductor industry (SC)

    Operating highly efficiently at low cost, Anseros ozone systems redundantize the use of chemicals

    Ozone applications are used in the semiconductor industry for, amongst others,

    Wet cleaning

    TEOS

    CVD

    Dry cleaning

    Hydrophobics

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      DI SYSTEMS FOR WAFER PROCESSING

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      Ozone Production

      Ozone generating systems for semiconductor industry (SC)

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        Ozone generators for semiconductor industry (SC)

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          Ozone Destruction

          Ozone destruction systems for semiconductor industry (SC)

          Ozone destructors for semiconductor industry (SC)

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            Ozone Measuring

            Ozone gas analyser for semiconductor industry (SC)

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              Ozone water analysers for semiconductor industry (SC)

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                Ozone Safety Monitoring

                Ozone ambient air devices and room safety systems for semiconductor industry (SC)

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                  Ozone Peripherals

                  Ozone components for semiconductor industry (SC)

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                    Literature:

                    [1] Gise, P. and Blanchard, R. (1998): Modern Semiconductor Fabrication, Englewood Cliffs, New Jersey
                    [2] Kern, W. (1993): Handbook of Semiconductor Wafer Cleaning Technology, Noyes Publications, New Jersey
                    [3] Gottschalk, G.; Libra, J.; Saupe, A. (2010): Ozonation of Water and Waste Water, Wily-VCH Verlag GmbH&Co.KGaA, Weinheim