Semiconductor Industry

In recent years, the interest in ozone applications has grown considerably in the semiconductor industry. The use of ozone for cleaning wafers has become established by now. The fact that ozone oxidizes organic and metal contaminants in the water phase is made use of.

Ozone applications are used in the semiconductor industry for, amongst others,

+ Wet cleaning
+ TEOS
+ CVD
+ Dry cleaning
+ Hydrophobics

Operating highly efficiently at low cost, Anseros ozone systems redundantize the use of chemicals.

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Keywords: wafer, silicon, metal-free, TOC, ultrapure water, UPW, semiconductor, water cycle, UV, ozone, layer, oxidation, cloth, CVD, ACVD.